Progress in fabrication of waveguide spatial light modulators via femtosecond laser micromachining
Author(s)
Moebius, Michael; Mazur, Eric; Savidis, Nickolaos; Jolly, Sunny; Datta, Bianca; Karydis, Thrasyvoulos; Gershenfeld, Neil A; Bove, V. Michael, Jr.; ... Show more Show less
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We have previously introduced a femtosecond laser micromachining-based scheme for the fabrication of anisotropic waveguides in lithium niobate for use in a guided-wave acousto-optic spatial light modulator. This spatial light modulation scheme is extensible to off-plane waveguide holography via the integration of a Bragg reflection grating. In this paper, we present femtosecond laser-based direct-write approaches for the fabrication of (1) waveguide in-coupling gratings and (2) volume Bragg reflection gratings via permanent refractive index changes within the lithium niobate substrate. In combination with metal surface-acoustic-wave transducers, these direct-write approaches allow for complete fabrication of a functional spatial light modulator via femtosecond laser direct writing. Keywords: guided-wave acousto-optics, femtosecond laser micromachining, laser-written waveguides, laser-written gratings, lithium niobate, volume gratings
Date issued
2017-01Department
Massachusetts Institute of Technology. Center for Bits and Atoms; Massachusetts Institute of Technology. Media Laboratory; Program in Media Arts and Sciences (Massachusetts Institute of Technology)Journal
Proceedings Volume 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
Publisher
SPIE
Citation
Savidis, Nickolaos, et al. "Progress in Fabrication of Waveguide Spatial Light Modulators via Femtosecond Laser Micromachining." Proceedings Volume 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 28 January - February 2, 2017, San Francisco, California, edited by Georg von Freymann et al., 2017, SPIE, p. 101150R. © 2017 SPIE
Version: Final published version