Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy
Author(s)
Zhou, Zen-Hong
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Advisor
Rafael Reif.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (p. 170-182).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science