| dc.contributor.advisor | Klavs F. Jensen. | en_US |
| dc.contributor.author | Han, Jaesung | en_US |
| dc.date.accessioned | 2005-08-16T14:20:42Z | |
| dc.date.available | 2005-08-16T14:20:42Z | |
| dc.date.copyright | 1993 | en_US |
| dc.date.issued | 1993 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/12494 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993. | en_US |
| dc.description | Includes bibliographical references (leaves 192-203). | en_US |
| dc.description.statementofresponsibility | by Jaesung Han. | en_US |
| dc.format.extent | 203 leaves | en_US |
| dc.format.extent | 13360260 bytes | |
| dc.format.extent | 13360019 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Chemical Engineering | en_US |
| dc.title | Combined experimental and modelling studies of laser assisted chemical vapor deposition of copper and aluminum | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Chemical Engineering | |
| dc.identifier.oclc | 29959468 | en_US |
