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Silicon micromachined wafer-bonded valves

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Silicon micromachined wafer-bonded valves

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Author: Huff, Michael Allan
Department: Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science
Publisher: Massachusetts Institute of Technology
Date Issued: 1993
Description:
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.Includes bibliographical references (v. 2, leaves 429-436).
URI: http://dspace.mit.edu/handle/1721.1/12727
http://hdl.handle.net/1721.1/12727
Keywords: Electrical Engineering and Computer Science

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