Growth, characterization and thermal stability of undoped and in-situ doped silicon-germanium heteroepitaxial layers
Citable URI:
http://hdl.handle.net/1721.1/12744
| Title: | Growth, characterization and thermal stability of undoped and in-situ doped silicon-germanium heteroepitaxial layers |
| Author: | Jang, Syun-Ming |
| Advisor: | Rafael Reif. |
| Department: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1993 |
| Description: |
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1993. Includes bibliographical references (leaves 186-196). |
| URI: | http://hdl.handle.net/1721.1/12744 |
| Keywords: | Materials Science and Engineering |
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