Browsing Graduate Theses by Author "Ma, Hongshen, 1978-"

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    • Capacitive displacement sensing for the Nanogate 

      Ma, Hongshen, 1978- (Massachusetts Institute of Technology, 2004)
      The Nanogate is a micro electro mechanical systems (MEMS) device that uses a cantilever structure to control the separation between two extremely flat surfaces. It has been proposed that the Nanogate be used as part of a ...