Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2
Citable URI:
http://hdl.handle.net/1721.1/13187
| Title: | Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2 |
| Author: | Gray, David Charles |
| Advisor: | Herbert H. Sawin. |
| Department: | Massachusetts Institute of Technology. Dept. of Chemical Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1992 |
| Description: |
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992. Includes bibliographical references (p. 376-384). |
| URI: | http://hdl.handle.net/1721.1/13187 |
| Keywords: | Chemical Engineering |
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