Device structures for microelectronic gas sensors.
Citable URI:
http://hdl.handle.net/1721.1/13573
| Title: | Device structures for microelectronic gas sensors. |
| Author: | Wishneusky, John Andrew |
| Advisor: | Stephen D. Senturia. |
| Department: | Massachusetts Institute of Technology. Dept. of Electrical Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1974 |
| Description: |
Massachusetts Institute of Technology. Dept. of Electrical Engineering. Thesis. 1974. Elec.E. MICROFICHE COPY ALSO AVAILABLE IN BARKER ENGINEERING LIBRARY. Includes bibliographical footnotes. |
| URI: | http://hdl.handle.net/1721.1/13573 |
| Keywords: | Electrical Engineering |
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