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Device structures for microelectronic gas sensors.

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dc.contributor.advisor Stephen D. Senturia. en_US
dc.contributor.author Wishneusky, John Andrew en_US
dc.date.accessioned 2005-08-10T22:05:17Z
dc.date.available 2005-08-10T22:05:17Z
dc.date.issued 1974 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/13573
dc.description Massachusetts Institute of Technology. Dept. of Electrical Engineering. Thesis. 1974. Elec.E. en_US
dc.description MICROFICHE COPY ALSO AVAILABLE IN BARKER ENGINEERING LIBRARY. en_US
dc.description Includes bibliographical footnotes. en_US
dc.format.extent 126 leaves en_US
dc.format.extent 5488170 bytes
dc.format.extent 5487929 bytes
dc.format.mimetype application/pdf
dc.format.mimetype application/pdf
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.rights.uri http://dspace.mit.edu/handle/1721.1/7582
dc.subject Electrical Engineering en_US
dc.title Device structures for microelectronic gas sensors. en_US
dc.type Thesis en_US
dc.description.degree Elec.E. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Electrical Engineering en_US
dc.identifier.oclc 24124117 en_US


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