Advanced Search
DSpace@MIT

Growth and characterization of low temperature silicon selective epitaxy

Research and Teaching Output of the MIT Community

Growth and characterization of low temperature silicon selective epitaxy

Download
Author: Yew, Tri-Rung
Department: Massachusetts Institute of Technology. Dept. of Materials Science and Engineering
Publisher: Massachusetts Institute of Technology
Date Issued: 1990
Description:
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990.Includes bibliographical references (leaves 204-210).
URI: http://hdl.handle.net/1721.1/13640
Keywords: Materials Science and Engineering

Show full item metadata

Files in this item

Name Size Format Description
24250400.pdf 24.11Mb PDF Preview, non-printable (open to all)
24250400-MIT.pdf 24.11Mb PDF Full printable version (MIT only)

This item appears in the following Collection(s)

MIT-Mirage