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Characterization of mechanical properties of microelectronic thin films

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Characterization of mechanical properties of microelectronic thin films

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Author: Maseeh, Fariborz
Other Contributors: Massachusetts Institute of Technology. Dept. of Civil Engineering.
Advisor: Stephen D. Senturia.
Department: Massachusetts Institute of Technology. Dept. of Civil Engineering.
Publisher: Massachusetts Institute of Technology
Date Issued: 1990
Description:
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil Engineering, 1990.Includes bibliographical references (leaves 172-181).
URI: http://hdl.handle.net/1721.1/14081
Keywords: Civil Engineering.

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