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Vapor phase hydrolysis of silicon tetrafluoride

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dc.contributor.advisor D.B. Broughton. en_US Secord, Robert N. (Robert Newton) en_US 2006-02-02T18:42:01Z 2006-02-02T18:42:01Z 1947 en_US
dc.description Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1947. en_US
dc.description Includes bibliographical references (leaves 42-43). en_US
dc.description.statementofresponsibility by Robert N. Secord. en_US
dc.format.extent 43 leaves en_US
dc.format.extent 3665351 bytes
dc.format.extent 3668677 bytes
dc.format.mimetype application/pdf
dc.format.mimetype application/pdf
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.subject Chemical Engineering en_US
dc.title Vapor phase hydrolysis of silicon tetrafluoride en_US
dc.type Thesis en_US M.S. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Chemical Engineering en_US
dc.identifier.oclc 28365169 en_US

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