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Benchmarking semiconductor lithography equipment development & sourcing practices among leading-edge U.S. manufacturers

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Benchmarking semiconductor lithography equipment development & sourcing practices among leading-edge U.S. manufacturers

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Author: Pieczulewski, Charles N. (Charles Nicholas)
Department: Massachusetts Institute of Technology. Dept. of Materials Science and Engineering
Publisher: Massachusetts Institute of Technology
Date Issued: 1995
Description:
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.Includes bibliographical references.
URI: http://hdl.handle.net/1721.1/32171
Keywords: Materials Science and Engineering

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