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Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling

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dc.contributor.advisor Joseph B. Bernstein. en_US
dc.contributor.author Rasera, Roy L. (Roy Louis) en_US
dc.date.accessioned 2006-03-29T18:22:02Z
dc.date.available 2006-03-29T18:22:02Z
dc.date.copyright 1995 en_US
dc.date.issued 1995 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/32180
dc.description Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. en_US
dc.description Includes bibliographical references (leaves 104-106). en_US
dc.description.statementofresponsibility by Roy L. Rasera. en_US
dc.format.extent 106 leaves en_US
dc.format.extent 6432981 bytes
dc.format.extent 6438915 bytes
dc.format.mimetype application/pdf
dc.format.mimetype application/pdf
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.rights.uri http://dspace.mit.edu/handle/1721.1/7582
dc.subject Materials Science and Engineering en_US
dc.title Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling en_US
dc.type Thesis en_US
dc.description.degree M.S. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Materials Science and Engineering en_US
dc.identifier.oclc 34311938 en_US


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