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Crystallization in self-implanted polycrystalline silicon-on-insulator films

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Crystallization in self-implanted polycrystalline silicon-on-insulator films

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Author: Iverson, Ralph Benhart
Other Contributors: Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor: L. Rafael Reif.
Department: Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Publisher: Massachusetts Institute of Technology
Date Issued: 1987
Description:
Bibliography: leaves 118-122.Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1987.
URI: http://hdl.handle.net/1721.1/32570
Keywords: Electrical Engineering and Computer Science.

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