Feasibility study of spatial-phase-locked focused-ion-beam lithography
Citable URI:
http://hdl.handle.net/1721.1/32663
| Title: | Feasibility study of spatial-phase-locked focused-ion-beam lithography |
| Author: | Yasaka, Anto |
| Advisor: | Henry I. Smith. |
| Department: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1995 |
| Description: |
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. Includes bibliographical references (leaves 66-68). |
| URI: | http://hdl.handle.net/1721.1/32663 |
| Keywords: | Materials Science and Engineering |
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