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Fabrication and characterization of nanofluidic channels for studying molecular dynamics in confined environments

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dc.contributor.advisor Jongyoon Han and Peter So. en_US Mao, Pan en_US
dc.contributor.other Massachusetts Institute of Technology. Dept. of Mechanical Engineering. en_US 2006-09-28T15:12:21Z 2006-09-28T15:12:21Z 2005 en_US 2005 en_US
dc.description Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005. en_US
dc.description Includes bibliographical references (leaves 87-94). en_US
dc.description.abstract This thesis has characterized the applicability and limitation of PDMS micromolding and the substrate bonding techniques including both anodic (Si-glass) and thermal fusion (glass-glass) bonding, in fabricating sub-100-nm thick nanofluidic channels, which will be used for a controlled experimental study of molecular and fluidic transport in confined space. It is found that the fabrication of nanofluidic channels using PDMS substrate is generally limited to the thickness of -100 nm because of the softness of the materials. Also, the gas permeability of PDMS poses a significant challenge in the operation of the nanofluidic devices. We demonstrate that nanofluidic channels, as thin as 20 nm with high aspect ratio (more than 250:1, width to depth) on silicon substrate and 25 nm with aspect ratio of 2000 on glass substrate can be achieved with anodic bonding technique and direct glass-glass bonding technique, respectively. Scanning electron microscopy (SEM) measurement is used to prove that the channels are of good uniformity and there is no significant change of the depth of nanofluidic channels due to anodic bonding process and glass-glass bonding process. en_US
dc.description.abstract (cont.) In addition, we have demonstrated massively-parallel vertical nanofluidic filters, with fluidic conductance as large as standard microfluidic channels, by using a combination of deep reactive ion etching (DRIE) and anisotropic KOH etching followed by an oxidation step. The lateral nanofilter array device achieved separation of the mixture of X-DNA and Hind III digest of lambda DNA in half an hour by the mechanism of entropic trapping. The fabrication strategy for the nanofilter array device can be further optimized to achieve the uniform gap. These devices could be a key to the high-throughput nanofluidic sample-preparation microsystems. en_US
dc.description.statementofresponsibility by Pan Mao. en_US
dc.format.extent 94 leaves en_US
dc.format.extent 5427004 bytes
dc.format.extent 5430936 bytes
dc.format.mimetype application/pdf
dc.format.mimetype application/pdf
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.subject Mechanical Engineering. en_US
dc.title Fabrication and characterization of nanofluidic channels for studying molecular dynamics in confined environments en_US
dc.type Thesis en_US S.M. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Mechanical Engineering. en_US
dc.identifier.oclc 69018170 en_US

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