Fabrication of superconducting nanowire single proton detectors
Name
70078363-MIT.pdf
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11.59 MB
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Checksum (MD5)
6b69592c8f812e9f9ce43e4b23fc503d
Author(s)
Yang, Joel K. (Joel Kwang wei)
Advisor(s)
Karl K. Berggren.
Date Issued
2005
Publisher
Massachusetts Institute of Technology
Abstract
The future NASA Mars project will need an ultra-fast, highly sensitive photodetector to increase the bandwidth of free-space long-range communication, which is now done primarily using RF signals. Our original motivation in fabricating superconducting nanowire single-photon detectors (SN-SPD) is to fulfill this need. The SN-SPD's reported GHz counting rates [1] make it very attractive for this application. A new fabrication process for making SN-SPDs using hydrogen-silsesqioxane (HSQ), a high-resolution electron-beam lithography resist will be presented. An electron-beam proximity-effect correction program was developed to achieve nanowires with uniform linewidths, which is important for device performance. Finally, we present initial test results that show device functionality and performance. Our best device has a detection efficiency of [approx.] 10 % at 1064 nm photon wavelength at 2.1 K and a photon-induced voltage-pulse duration of [approx.] 3 ns.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005.
Includes bibliographical references (p. 81-85).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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