Choi, Z.-S.; Gan, C.L.; Wei, F.; Thompson, Carl V.; Lee, J.H.; Marieb, T.; Maiz, J.; Pey, Kin Leong; Choi, Wee Kiong
(2004-01)
The median-times-to-failure (t₅₀’s) for straight dual-damascene via-terminated copper interconnect structures, tested under the same conditions, depend on whether the vias connect down to underlaying leads ...