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Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Title

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Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Title

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  • Chang, Choon Wai; Choi, Z.-S.; Thompson, Carl V.; Gan, C.L.; Pey, Kin Leong; Choi, Wee Kiong; Hwang, N. (2005-01)
    Three terminal ‘dotted-I’ interconnect structures, with vias at both ends and an additional via in the middle, were tested under various test conditions. Mortalities (failures) were found in right segments with jL value ...
  • Jin, Lijuan; Pey, Kin Leong; Choi, Wee Kiong; Fitzgerald, Eugene A.; Antoniadis, Dimitri A.; Pitera, Arthur J.; Lee, Minjoo L.; Chi, D.Z. (2003-01)
    The interfacial reaction of Ni with Si, Si₀.₇₅Ge₀.₂₅, and Ge at 400°C has been investigated. A uniform epitaxial NiSi film was obtained at 400°C for Ni-Silicidation on Si using rapid thermal annealing method. Similarly, ...
  • Gan, C.L.; Thompson, Carl V.; Pey, Kin Leong; Choi, Wee Kiong; Wei, F.; Hau-Riege, S.P.; Augur, R.; Tay, H.L.; Yu, B.; Radhakrishnan, M.K. (2002-01)
    An investigation has been carried out to determine the fundamental reliability unit of copper dual-damascene metallization. Electromigration experiments have been carried out on straight via-to-via interconnects in the ...
  • Meng, Shirley Y.; Li, Yi; Ceder, Gerbrand (2003-01)
    Aluminum based amorphous metallic glass powders were produced and tested as the anode materials for the lithium ion rechargeable batteries. Ground Al₈₀Ni&#x2081₀La&#x2081₀ was found to have a ...
  • Shi, Z.; Lü, L.; Ceder, Gerbrand (2004-01)
    Thin film lithium microbatteries were investigated in this project in which LiCoO₂ cathodes about 200 to 500 nm were fabricated by pulsed-laser deposition (PLD) at different processing parameters such as laser energy ...
  • Vajpeyi, Agam P.; Chua, Soo-Jin; Fitzgerald, Eugene A. (2003-01)
    This paper involves the calculation for composition of different layer used in laser structure and the simulation of cavity, formed by creating air columns in the InGaAsP medium, for square lattice. The aim of this project ...
  • Wei, F.; Hau-Riege, S.P.; Gan, C.L.; Thompson, Carl V.; Clement, J.J.; Tay, H.L.; Yu, B.; Radhakrishnan, M.K.; Pey, Kin Leong; Choi, Wee Kiong (2002-01)
    The effects of interconnect length on the reliability of dual-damascene Cu metallization have been investigated. As in Al-based interconnects, the lifetimes of Cu lines increase with decreasing length. However, unlike ...
  • Fonstad, Clifton G. Jr. (2002-01)
    This paper presents a new technique for the monolithic heterogeneous integration of compound semiconductor devices with silicon integrated circuits, and establishes the theoretical foundation for a key element of the ...
  • Shah, M.; Zeng, K.; Tay, A.A.O.; Suresh, Subra (2002-01)
    With increasing miniaturization in microelectronics the wirebonds used in IC packages are witnessing a thrust towards fine pitch wirebonding. To have a precise control over loop height of the wirebond for fine pitch ...
  • Lee, M.L.; Li, Yi; Zhong, Yi; Carter, W. Craig (2004-01)
    We have studied the mechanical properties of monolithic bulk metallic glasses and composite in the La based alloys. La₈₆₋yAl₁₄(Cu, Ni)y (y=24 to 32) alloy systems was used to cast the ...
  • Lee, Irene Mei Ling; Li, Yi; Carter, W. Craig (2003-01)
    Influence of different microstructure of La-based fully amorphous samples and its composites on the impact fracture energy were investigated and discussed. Results showed improvement in fracture energy of glassy metals ...
  • Spearing, S. Mark (2003-01)
    An overview is provided of materials and processes research currently being conducted in support of MEMS device design at MIT. Underpinning research is being conducted in five areas: room temperature strength characterization, ...
  • Takahashi, A. R.; Thompson, Carl V.; Carter, W. Craig (2003-01)
    During the evaporative deposition of polycrystalline thin films, the development of a tensile stress at small film thicknesses is associated with island coalescence. Several continuum models exist to describe the magnitude ...
  • Reed, John; Ceder, Gerbrand; Van Der Ven, A. (2002-01)
    Ab Initio calculations suggest that partially lithiated layered LixMnO₂ transforms to spinel in a two-stage process. In the first stage, a significant fraction of the Mn and Li ions rapidly occupy tetrahedral sites, forming ...
  • Maldovan, Martin. (2002-01)
    Lately, there has been an increasing interest in studying the propagation of electromagnetic waves in periodic dielectric structures (photonic crystals). Like the electron propagation in semiconductors, these structures ...
  • Vajpeyi, Agam P.; Chua, Soo-Jin; Fitzgerald, Eugene A.; Tripathy, S. (2004-01)
    Wurtzite GaN epilayers grown by metal organic chemical vapor deposition on sapphire substrates were subsequently ion implanted with Er to a dose of 5×10¹⁵ cm⁻². The implanted samples were annealed in nitrogen atmosphere ...
  • Koh, Yaw Koon; Wong, Chee Cheong (2006-01)
    Defect control in colloidal crystals is essential for these nanostructures to be effective as photonic bandgap (PBG) materials. We have used in-situ monitoring of the PBG of a colloidal crystal to study the structural ...
  • Chang, Choon Wai; Gan, C.L.; Thompson, Carl V.; Pey, Kin Leong; Choi, Wee Kiong; Hwang, N. (2004-01)
    Electromigration experiments have been carried out on straight interconnects that have single vias at each end, and are divided into two segments by a via in the center ("dotted-I" structures). For dotted-i structures in ...
  • Fitzgerald, Eugene A.; Lee, Minjoo L.; Leitz, Christopher W.; Antoniadis, Dimitri A. (2003-01)
    Biaxial tensile strained Si grown on SiGe virtual substrates will be incorporated into future generations of CMOS technology due to the lack of performance increase with scaling. Compressively strained Ge-rich alloys with ...
  • Zhang, Sam; Fu, Yongqing; Du, Hejun; Liu, Yang; Chen, Tupei (2004-01)
    The design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and ...
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