Hardt, David E.; Ganesan, Bala; Dirckx, Matthew; Shoji, Grant; Thaker, Kunal; Qi, Wang
(2005-01)
A promising technique for the large-scale manufacture of micro-fluidic devices and photonic devices is hot embossing of polymers such as PMMA. Micro-embossing is a deformation process where the workpiece material is heated ...