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    • Micro-layered-photolithography for Micro-Fabrication and Micro-Molding 

      Tang, Y.; Loh, Han Tong; Fuh, J.-Y.-H.; Lu, L.; Wong, Yeow Sheong; e.a. (2005-01)
      A novel process based on the principle of layered photolithography has been proposed and tested for making real three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this ...