Browsing Innovation in Manufacturing Systems and Technology (IMST) by Subject "microfabrication"
Now showing items 1-2 of 2
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Femtosecond Pulsed Laser Direct Writing System for Photomask Fabrication
(2002-01)Photomasks are the backbone of microfabrication industries. Currently they are fabricated by lithographic process, which is very expensive and time consuming since it is a several step process. These issues can be addressed ... -
Non-linear mechanical behavior of polydimethylsiloxane (PDMS): application to the manufacture of microfluidic devices
(2004-01)Soft-lithography is a low-cost and convenient microfabrication technique that is becoming increasingly popular in the manufacture of microfluidic devices. A typical elastomer used in soft-lithography is polydimethylsiloxane ...