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Modeling of Piezoelectric Tube Actuators
(2004-01)
A new dynamic model is presented for piezoelectric tube actuators commonly used in high-precision instruments. The model captures coupling between motions in all three axes such as bending motion due to a supposedly pure ...
On Dual Actuation in Atomic Force Microscopes
(2004-01)
In this paper, the problem of dual actuation in the atomic force microscope (AFM) is analyzed. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to ...