MIT Libraries homeMIT Libraries logoDSpace@MIT

MIT
View Item 
  • DSpace@MIT Home
  • MIT Libraries
  • MIT Theses
  • Graduate Theses
  • View Item
  • DSpace@MIT Home
  • MIT Libraries
  • MIT Theses
  • Graduate Theses
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

Data processing in nanoscale profilometry

Author(s)
Chiu, Cheng-Jung
Thumbnail
DownloadFull printable version (7.964Mb)
Other Contributors
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Advisor
Kamal Youcef-Toumi.
Terms of use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
Metadata
Show full item record
Abstract
New developments on the nanoscale are taking place rapidly in many fields. Instrumentation used to measure and understand the geometry and property of the small scale structure is therefore essential. One of the most promising devices to head the measurement science into the nanoscale is the scanning probe microscope. A prototype of a nanoscale profilometer based on the scanning probe microscope has been built in the Laboratory for Manufacturing and Productivity at MIT. A sample is placed on a precision flip stage and different sides of the sample are scanned under the SPM to acquire its separate surface topography. To reconstruct the original three dimensional profile, many techniques like digital filtering, edge identification, and image matching are investigated and implemented in the computer programs to post process the data, and with greater emphasis placed on the nanoscale application. The important programming issues are addressed, too. Finally, this system's error sources are discussed and analyzed.
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
 
Includes bibliographical references (p. 176-177).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/36677
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.

Collections
  • Graduate Theses

Browse

All of DSpaceCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

My Account

Login

Statistics

OA StatisticsStatistics by CountryStatistics by Department
MIT Libraries homeMIT Libraries logo

Find us on

Twitter Facebook Instagram YouTube RSS

MIT Libraries navigation

SearchHours & locationsBorrow & requestResearch supportAbout us
PrivacyPermissionsAccessibility
MIT
Massachusetts Institute of Technology
Content created by the MIT Libraries, CC BY-NC unless otherwise noted. Notify us about copyright concerns.