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Data processing in nanoscale profilometry

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Data processing in nanoscale profilometry

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Author: Chiu, Cheng-Jung
Other Contributors: Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Advisor: Kamal Youcef-Toumi.
Department: Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Publisher: Massachusetts Institute of Technology
Date Issued: 1995
Description:
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Includes bibliographical references (p. 176-177).
URI: http://hdl.handle.net/1721.1/36677
Keywords: Mechanical Engineering.

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