Data processing in nanoscale profilometry
Citable URI:
http://hdl.handle.net/1721.1/36677
| Title: | Data processing in nanoscale profilometry |
| Author: | Chiu, Cheng-Jung |
| Other Contributors: | Massachusetts Institute of Technology. Dept. of Mechanical Engineering. |
| Advisor: | Kamal Youcef-Toumi. |
| Department: | Massachusetts Institute of Technology. Dept. of Mechanical Engineering. |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1995 |
| Description: |
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. Includes bibliographical references (p. 176-177). |
| URI: | http://hdl.handle.net/1721.1/36677 |
| Keywords: | Mechanical Engineering. |
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