A laser-assisted microchemistry system for the fabrication of small electromechanical devices
Citable URI:
http://hdl.handle.net/1721.1/36928
| Title: | A laser-assisted microchemistry system for the fabrication of small electromechanical devices |
| Author: | Nassuphis, Nick I |
| Advisor: | D.J. Ehrlich, A. Slocum. |
| Department: | Massachusetts Institute of Technology. Dept. of Mechanical Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1994 |
| Description: |
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994. Includes bibliographical references (leaves 80-82). |
| URI: | http://hdl.handle.net/1721.1/36928 |
| Keywords: | Mechanical Engineering |
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