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A laser-assisted microchemistry system for the fabrication of small electromechanical devices

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dc.contributor.advisor D.J. Ehrlich, A. Slocum. en_US
dc.contributor.author Nassuphis, Nick I en_US
dc.date.accessioned 2007-04-03T16:52:22Z
dc.date.available 2007-04-03T16:52:22Z
dc.date.copyright 1994 en_US
dc.date.issued 1994 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/36928
dc.description Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994. en_US
dc.description Includes bibliographical references (leaves 80-82). en_US
dc.description.statementofresponsibility by Nick I. Nassuphis. en_US
dc.format.extent 82 leaves en_US
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.rights.uri http://dspace.mit.edu/handle/1721.1/7582
dc.subject Mechanical Engineering en_US
dc.title A laser-assisted microchemistry system for the fabrication of small electromechanical devices en_US
dc.type Thesis en_US
dc.description.degree M.S. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Mechanical Engineering en_US
dc.identifier.oclc 30822295 en_US


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