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Characterization of Diamond-Like Film after Focused Ion Beam Processing

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dc.contributor.author Fu, Yongqi
dc.contributor.author Ngoi, Kok Ann Bryan
dc.date.accessioned 2003-11-29T20:01:36Z
dc.date.available 2003-11-29T20:01:36Z
dc.date.issued 2003-01
dc.identifier.uri http://hdl.handle.net/1721.1/3736
dc.description.abstract Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still can be used for optical applications. As an application example, diffractive optical element (DOE) was directly fabricated on the film by use of FIBM. Measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use. en
dc.description.sponsorship Singapore-MIT Alliance (SMA) en
dc.format.extent 75758 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.relation.ispartofseries Innovation in Manufacturing Systems and Technology (IMST);
dc.subject DLC en
dc.subject FIBM en
dc.subject optical properties en
dc.subject XPS en
dc.title Characterization of Diamond-Like Film after Focused Ion Beam Processing en
dc.type Article en


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