Applying run-by-run process control to chemical-mechanical planarization and assessing insertion costs versus benefits of CMP

Author(s)
Altman, Arthur H
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Advisor
Duane Boning, Jeffrey A. Barks.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1995, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
 
Includes bibliographical references (p. 87-89).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/37766
Department
Sloan School of Management; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Sloan School of Management, Electrical Engineering and Computer Science
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