Material transport and reaction effects in surface typography evolution during plasma etching
Citable URI:
http://hdl.handle.net/1721.1/38041
| Title: | Material transport and reaction effects in surface typography evolution during plasma etching |
| Author: | Arnold, John Christopher, 1964- |
| Advisor: | Herbert H. Sawin. |
| Department: | Massachusetts Institute of Technology. Dept. of Chemical Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1995 |
| Description: |
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995. Includes bibliographical references (leaves 318-324). |
| URI: | http://hdl.handle.net/1721.1/38041 |
| Keywords: | Chemical Engineering |
Files in this item
| Files | Size | Format | View | Description |
|---|---|---|---|---|
| Preview, non-printable (open to all) | 17.71Mb |
View/ |
Preview, non-printable (open to all) | |
| Full printable version (MIT only) | 17.71Mb |
View/ |
Full printable version (MIT only) |
This item appears in the following Collection(s)
All Items in DSpace@MIT are protected by original copyright, with all rights reserved, unless otherwise indicated.
|
|
Contact
MIT Libraries
|