| Title: | Load deflection analysis for determining mechanical properties of thin films with tensile and compressive residual stresses |
| Author: | Bulsara, Mayank T. (Mayank Thakordas) |
| Advisor: | Stuart B. Brown. |
| Department: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1995 |
| Description: |
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. Includes bibliographical references (leaves 24-25). |
| URI: | http://hdl.handle.net/1721.1/38097 |
| Keywords: | Materials Science and Engineering |
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