Dynamic nanometer alignment for nanofabrication and metrology
Citable URI:
http://hdl.handle.net/1721.1/41799
| Title: | Dynamic nanometer alignment for nanofabrication and metrology |
| Author: | Moon, Euclid E. (Euclid Eberle), 1965- |
| Advisor: | Henry I. Smith. |
| Department: | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1998 |
| Description: |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (leaves 163-164). |
| URI: | http://hdl.handle.net/1721.1/41799 |
| Keywords: | Electrical Engineering and Computer Science |
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