| dc.contributor.advisor |
Henry I. Smith. |
en_US |
| dc.contributor.author |
Moon, Euclid E. (Euclid Eberle), 1965- |
en_US |
| dc.date.accessioned |
2008-05-19T16:18:49Z |
|
| dc.date.available |
2008-05-19T16:18:49Z |
|
| dc.date.copyright |
1998 |
en_US |
| dc.date.issued |
1998 |
en_US |
| dc.identifier.uri |
http://hdl.handle.net/1721.1/41799 |
|
| dc.description |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. |
en_US |
| dc.description |
Includes bibliographical references (leaves 163-164). |
en_US |
| dc.description.provenance |
Made available in DSpace on 2008-05-19T16:18:49Z (GMT). No. of bitstreams: 2
42306235.pdf: 22117709 bytes, checksum: 9c933113d6ffa8610e2f95c1f924519e (MD5)
42306235-MIT.pdf: 22117337 bytes, checksum: ccd85d0348ffb1a387f16486a3e8271e (MD5)
Previous issue date: 1998 |
en |
| dc.description.statementofresponsibility |
by Euclid E. Moon. |
en_US |
| dc.format.extent |
164 leaves |
en_US |
| dc.language.iso |
eng |
en_US |
| dc.publisher |
Massachusetts Institute of Technology |
en_US |
| dc.rights |
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. |
en_US |
| dc.rights.uri |
http://dspace.mit.edu/handle/1721.1/7582 |
en_US |
| dc.subject |
Electrical Engineering and Computer Science |
en_US |
| dc.title |
Dynamic nanometer alignment for nanofabrication and metrology |
en_US |
| dc.type |
Thesis |
en_US |
| dc.description.degree |
S.M. |
en_US |
| dc.contributor.department |
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science |
en_US |
| dc.identifier.oclc |
42306235 |
en_US |
