Advanced Search
DSpace@MIT

Characterization of mechanical and optical properties of x-ray mask membranes

Research and Teaching Output of the MIT Community

Characterization of mechanical and optical properties of x-ray mask membranes

Download
Author: Tsai, Flora S.
Publisher: Research Laboratory of Electronics, Massachusetts Institute of Technology
Date Issued: 1991
Description:
Includes bibliographical references (leaves 48-49).
URI: http://hdl.handle.net/1721.1/4188
Other Identifiers: no.564
Series/Report no.: Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 564.
Keywords: TK7855.M41 R43 no.564

Show full item metadata

Files in this item

Name Size Format Description
RLE-TR-564-241018 ... 1.960Mb PDF

This item appears in the following Collection(s)

MIT-Mirage