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Characterization of mechanical and optical properties of x-ray mask membranes

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dc.contributor Tsai, Flora S. en_US
dc.date.accessioned 2004-03-02T18:29:34Z
dc.date.available 2004-03-02T18:29:34Z
dc.date.issued 1991 en_US
dc.identifier.other no.564 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/4188
dc.description Includes bibliographical references (leaves 48-49). en_US
dc.description.sponsorship Research supported by the National Science Foundation. ECS 90-16437 Research supported by the Naval Research Laboratory. N00014-90-K-2018 en_US
dc.description.statementofresponsibility Flora S. Tsai. en_US
dc.format.extent 49 leaves en_US
dc.format.extent 2055944 bytes
dc.format.mimetype application/pdf
dc.language.iso eng en_US
dc.publisher Research Laboratory of Electronics, Massachusetts Institute of Technology en_US
dc.relation.ispartofseries Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 564. en_US
dc.subject.lcc TK7855.M41 R43 no.564 en_US
dc.title Characterization of mechanical and optical properties of x-ray mask membranes en_US


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