Characterization of mechanical and optical properties of x-ray mask membranes

dc.contributor	Tsai, Flora S.	en_US
dc.date.accessioned	2004-03-02T18:29:34Z
dc.date.available	2004-03-02T18:29:34Z
dc.date.issued	1991	en_US
dc.identifier.other	no.564	en_US
dc.identifier.uri	http://hdl.handle.net/1721.1/4188
dc.description	Includes bibliographical references (leaves 48-49).	en_US
dc.description.sponsorship	Research supported by the National Science Foundation. ECS 90-16437 Research supported by the Naval Research Laboratory. N00014-90-K-2018	en_US
dc.description.statementofresponsibility	Flora S. Tsai.	en_US
dc.format.extent	49 leaves	en_US
dc.format.extent	2055944 bytes
dc.format.mimetype	application/pdf
dc.language.iso	eng	en_US
dc.publisher	Research Laboratory of Electronics, Massachusetts Institute of Technology	en_US
dc.relation.ispartofseries	Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 564.	en_US
dc.subject.lcc	TK7855.M41 R43 no.564	en_US
dc.title	Characterization of mechanical and optical properties of x-ray mask membranes	en_US