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Ion beam enhanced grain growth in thin films

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Ion beam enhanced grain growth in thin films

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Author: Atwater, Harry Albert, 1960-
Publisher: Massachusetts Institute of Technology, Research Laboratory of Electronics
Date Issued: 1987
Description:
Bibliography: p. 213-224.
URI: http://hdl.handle.net/1721.1/4216
Other Identifiers: no 527
Series/Report no.: Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 527.
Keywords: TK7855.M41 R43 no.527

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