Hyperthermal molecular beam dry etching of III-V compound semiconductors
Citable URI:
http://hdl.handle.net/1721.1/43365
| Title: | Hyperthermal molecular beam dry etching of III-V compound semiconductors |
| Author: | Hoshino, Isako. |
| Advisor: | Clifton G. Fonstad, Jr. |
| Department: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1997 |
| Description: |
Includes bibliographical references (p. 181-186). Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997. Vita. |
| URI: | http://hdl.handle.net/1721.1/43365 |
| Keywords: | Materials Science and Engineering |
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