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Atom abstraction in the interaction of F₂ and XeF₂ with Si(100)

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Title: Atom abstraction in the interaction of F₂ and XeF₂ with Si(100)
Author: Gosalvez-Blanco, David, 1968-
Advisor: Sylvia T. Ceyer.
Department: Massachusetts Institute of Technology. Dept. of Chemistry
Publisher: Massachusetts Institute of Technology
Issue Date: 1997
Description: Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 1997.Includes bibliographical references.
URI: http://hdl.handle.net/1721.1/43505
Keywords: Chemistry

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