| Title: | Atom abstraction in the interaction of F₂ and XeF₂ with Si(100) |
| Author: | Gosalvez-Blanco, David, 1968- |
| Advisor: | Sylvia T. Ceyer. |
| Department: | Massachusetts Institute of Technology. Dept. of Chemistry |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1997 |
| Description: |
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 1997. Includes bibliographical references. |
| URI: | http://hdl.handle.net/1721.1/43505 |
| Keywords: | Chemistry |
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