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A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating

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A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating

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Alternative Title: Fluid layer overlap in extrusion-spin coating
Author: Derksen, James Stephen
Department: Massachusetts Institute of Technology. Dept. of Mechanical Engineering
Publisher: Massachusetts Institute of Technology
Date Issued: 1997
Description:
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes bibliographical references (p. 128-131).
URI: http://hdl.handle.net/1721.1/43575
Keywords: Mechanical Engineering

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