Wafer bonding for monolithic integration of Si CMOS VLSI electonics with III-V optoelectronic devices
Citable URI:
http://hdl.handle.net/1721.1/45498
| Title: | Wafer bonding for monolithic integration of Si CMOS VLSI electonics with III-V optoelectronic devices |
| Author: | London, Joanna M., 1974- |
| Other Contributors: | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. |
| Advisor: | Clifton G. Fonstad, Jr. |
| Department: | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1999 |
| Description: |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 1999. Includes bibliographical references (p. 90-91). |
| URI: | http://hdl.handle.net/1721.1/45498 |
| Keywords: | Electrical Engineering and Computer Science. |
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