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Capacitive position-sensing and electronics for a linear electrostatic micromotor

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Capacitive position-sensing and electronics for a linear electrostatic micromotor

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Alternative Title: Capacitive position-sensing system and electronics for a linear electrostatic micromotor
Author: Kim, Lily Y. (Lily Yvonne), 1976-
Department: Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science
Publisher: Massachusetts Institute of Technology
Date Issued: 1998
Description:
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.Includes bibliographical references (p. 76).
URI: http://hdl.handle.net/1721.1/46214
Keywords: Electrical Engineering and Computer Science

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