Copper metallization with an electron cyclotron resonance
Citable URI:
http://hdl.handle.net/1721.1/47685
| Title: | Copper metallization with an electron cyclotron resonance |
| Author: | Shadman, K. (Khashayar), 1972- |
| Other Contributors: | Massachusetts Institute of Technology. Dept. of Nuclear Engineering. |
| Advisor: | Jeffrey Philip Freidberg. |
| Department: | Massachusetts Institute of Technology. Dept. of Nuclear Engineering. |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1998 |
| Description: |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Nuclear Engineering, 1998. Includes bibliographical references. |
| URI: | http://hdl.handle.net/1721.1/47685 |
| Keywords: | Nuclear Engineering. |
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| Preview, non-printable (open to all) | 12.40Mb | application/pdf |
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