Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
Citable URI:
http://hdl.handle.net/1721.1/49640
| Title: | Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes |
| Author: | Banerjee, Suman K. (Suman Kumar), 1972- |
| Advisor: | Klavs F. Jensen. |
| Department: | Massachusetts Institute of Technology. Dept. of Chemical Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1998 |
| Description: |
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998. Includes bibliographical references. |
| URI: | http://hdl.handle.net/1721.1/49640 |
| Keywords: | Chemical Engineering |
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