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Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes

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Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes

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Author: Banerjee, Suman K. (Suman Kumar), 1972-
Department: Massachusetts Institute of Technology. Dept. of Chemical Engineering
Publisher: Massachusetts Institute of Technology
Date Issued: 1998
Description:
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.Includes bibliographical references.
URI: http://hdl.handle.net/1721.1/49640
Keywords: Chemical Engineering

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