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Titanium nitride thin films by the electron shower process

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Titanium nitride thin films by the electron shower process

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Author: LeClair, Patrick R. (Patrick Royce), 1976-
Department: Massachusetts Institute of Technology. Dept. of Materials Science and Engineering
Publisher: Massachusetts Institute of Technology
Date Issued: 1998
Description:
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.Includes bibliographical references (leaves 54-56).
URI: http://hdl.handle.net/1721.1/50025
Keywords: Materials Science and Engineering

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