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Silicon micromachined sensors and sensor arrays for shear-stress measurements in aerodynamic flows
(Aerospace Computational Design Laboratory, Dept. of Aeronautics & Astronautics, Massachusetts Institute of Technology, 1997-02)
In this thesis we report on a new micromachined floating-element shear-stress sensor for turbulent boundary layer research. Applications in low shear-stress environments such as turbulent boundary layers require extremely ...