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dc.contributor.authorColeman, John W.en_US
dc.contributor.authorDylla, H. Fredericken_US
dc.contributor.authorSilver, Bruce R.en_US
dc.date.accessioned2010-07-15T03:47:27Z
dc.date.available2010-07-15T03:47:27Z
dc.date.issued1975-07en_US
dc.identifierRLE_PR_116_IIen_US
dc.identifier.urihttp://hdl.handle.net/1721.1/56555
dc.descriptionContains reports on one research project.en_US
dc.description.sponsorshipJoint Services Electronics Program (Contract DAAB07-74-C-0630)en_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, July 1975en_US
dc.relation.ispartofGeneral Physicsen_US
dc.relation.ispartofElectron Opticsen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 116en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherElectron Opticsen_US
dc.subject.otherModular Programmable Electron Beam System for Spot Irradiation in Surface Researchen_US
dc.titleElectron Opticsen_US
dc.typeTechnical Reporten_US


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