Microstructure Fabrication
Citable URI:
http://hdl.handle.net/1721.1/56755
| Title: | Microstructure Fabrication |
| Author: | Smith, Henry I.; Melngailis, John; Dana, Stephane S.; Hawryluk, Andrew M.; Kwasnick, Robert F.; Bezdjian, Krikor A.; Flanders, Dale C.; Kappes, Manfred M.; Staley, Ralph H.; Kastner, Marc A.; Griswold, Marsden P.; Litster, James David; Von Känel, Hans |
| Publisher: | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| Issue Date: | 1980-01 |
| Description: | Contains reports on seven research projects. |
| URI: | http://hdl.handle.net/1721.1/56755 |
| Other Identifiers: | RLE_PR_122_XIX |
| Is Part Of | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1980 General Physics Microstructure Fabrication |
| Series/Report no.: | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 122 |
| Keywords: | Microstructure Fabrication, Creation of the Submicrometer Structures Laboratory, Development of Microstructure Fabrication Techniques, Graphoepitaxy, Attachment and Properties of Molecules on Submicrometer Structures, Electronic Transport in Quasi-One-Dimensional Submicrometer Structures in Silicon Inversion Layers, X-Ray Lenses, Diffraction Gratings, Submicrometer Structures, Liquid-Crystal Research |
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| RLE_PR_122_XIX.pdf | 289.6Kb |
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