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Submicron Structure Fabrication and Research

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Submicron Structure Fabrication and Research

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Author: Melngailis, John; Smith, Henry I.; Hawryluk, Andrew M.; Dana, Stephane S.; Bezdjian, Krikor A.; Rotter, Shlomo; Kwasnick, Robert F.; Kastner, Marc A.; Horwitz, Christopher M.
Publisher: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Date Issued: 1981-01
Description:
Contains reports on six research projects.
URI: http://hdl.handle.net/1721.1/56806
Other Identifiers: RLE_PR_123_XIX
Is Part Of: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1981
General Physics
Submicron Structure Fabrication and Research
Series/Report no.: Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 123
Keywords: Submicron Structure Fabrication, Submicron Structure Research, Operation of Submicron Structures Laboratory, Development of Microfabrication Techniques, X-Ray Lenses, X-Ray Gratings, Graphoepitaxy, One-Dimensional Conduction in Silicon, Reactive Ion Etching

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