Submicron Structures Technology and Research
Citable URI:
http://hdl.handle.net/1721.1/56894
| Title: | Submicron Structures Technology and Research |
| Author: | Anderson, Erik H.; Hawryluk, Andrew M.; Plotnik, Irving; Smith, Henry I.; Lezec, Henri J.; Melngailis, John; Kwasnick, Robert F.; Licini, Jerome C.; Kastner, Marc A.; Lee, Patrick A.; Warren, Alan C.; Antoniadis, Dimitri A.; Chou, Stephen Y.; Thompson, Carl V.; Yonehara, Takao; Wong, Chee C.; Atwater, Harry A.; Schattenburg, Mark L.; Ceglio, Natale M., Jr.; Canizares, Claude R.; Stein, Josephine A.; Summa, Deborah A.; Rajchman, Jan A.; Paynter, Henry M.; Chen, Dong-Pei; Islam, Mohammed; Haus, Hermann A. |
| Publisher: | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| Issue Date: | 1984-01 |
| Description: | Contains reports on thirteen research projects. |
| URI: | http://hdl.handle.net/1721.1/56894 |
| Other Identifiers: | RLE_PR_126_17 |
| Is Part Of | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1984 Submicron Structures Technology and Research |
| Series/Report no.: | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 126 |
| Keywords: | Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 0.1 μm and Below, Electronic Conduction in Ultra-Narrow Silicon Inversion Layers, Corrugated Gate MOS Structures, Submicron FET's in Si, Graphoepitaxy of Si, Graphoepitaxy of Ge, Graphoepitaxy of Model Materials, Zone-Melting Recrystallization of Si for Solar Cells, Zone-Melting Recrystallization of IIl-V Materials, Submicrometer-Period Gold Transmission Gratings, Zone Plates for X-Ray Spectroscopy and Microscopy, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Switchable Zero-Order Diffraction Gratings as Light Valves, Surface Acoustic Wave Propagation in Gratings, Collaborative Projects |
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| RLE_PR_126_17.pdf | 726.3Kb |
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