Submicron Structures Technology and Research
Citable URI:
http://hdl.handle.net/1721.1/56948
| Title: | Submicron Structures Technology and Research |
| Author: | Anderson, Erik H.; Chu, William; Plotnik, Irving; Schattenburg, Mark L.; Smith, Henry I.; Yen, Anthony T.; Warren, Alan C.; Antoniadis, Dimitri A.; Orlando, Terry P.; Melngailis, John; Chou, Stephen Y.; Shahidi, Ghavam G.; Licini, Jerome C.; Scott-Thomas, John H. F.; Park, Samuel L.; Kastner, Marc A.; Atwater, Harry A.; Garrison, Stephen M.; Palmer, Joyce E.; Quek, Hui Meng; Wong, Chee C.; Thompson, Carl V.; Canizaares, Claude C.; Stein, Josephine A.; Summa, Deborah A.; Paynter, Henry M.; Rajchman, Jan A.; Tse, Ming K. |
| Publisher: | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| Issue Date: | 1986-01 |
| Description: | Contains reports on ten research projects. |
| URI: | http://hdl.handle.net/1721.1/56948 |
| Other Identifiers: | RLE_PR_128_01 |
| Is Part Of | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986 Submicron Structures Technology and Research |
| Series/Report no.: | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128 |
| Keywords: | Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 0.1 μm and Below, Corrugated Gate MOS Structures, MOSFET's in Si with Deep-Submicron Channel Lengths, Electronic Conduction in Submicron Silicon Inversion Layers, Crystalline Films on Amorphous Substrates, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Soft X-Ray Interferometer Gratings, Switchable Zero Order Diffraction Grating Light Valves |
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| RLE_PR_128_01.pdf | 646.5Kb |
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